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Three-dimensional (3D) microfabrication refers to manufacturing techniques that involve the layering of materials to produce a three-dimensional structure at a microscopic scale.[1] These structures are usually on the scale of micrometers and are popular in microelectronics and microelectromechanical systems.
- ^ Baldacchini, Tommasso, ed. (2016). Three-Dimensional Microfabrication Using Two-Photon Polymerization: Fundamentals, Technology, and Applications. Elsevier. ISBN 978-0-323-35321-2.