Elastic recoil detection

Elastic recoil detection analysis (ERDA), also referred to as forward recoil scattering or spectrometry, is an ion beam analysis technique, in materials science, to obtain elemental concentration depth profiles in thin films.[1] This technique can be achieved using many processes.

In the technique of ERDA, an energetic ion beam is directed at a sample to be characterized and (as in Rutherford backscattering) there is an elastic nuclear interaction between the ions of the beam and the atoms of the target sample. Such interactions are commonly of Coulomb nature. Depending on the kinetics of the ions, cross section area, and the loss of energy of the ions in the matter, ERDA helps determine the quantification of the elemental analysis. It also provides information about the depth profile of the sample.

The energy of incident energetic ions can vary from 2 MeV to 200 MeV, depending on the studied sample.[2][3] The energy of the beam should be enough to kick out (“recoil”) the atoms of the sample. Thus, ERDA usually employs appropriate source and detectors to detect recoiled atoms.

ERDA setup is large, expensive and difficult to operate. Therefore, although it is commercially available, it is relatively uncommon in materials characterization. The angle of incidence that an ion beam makes with the sample must also be taken into account for correct analysis of the sample. This is because, depending on this angle, the recoiled atoms will be collected.[4]

ERDA has been used since 1974. It has similar theory to Rutherford backscattering spectrometry (RBS), but there are minor differences in the set-up of the experiment. In case of RBS, the detector is placed in the back of the sample whereas in ERDA, the detector is placed in the front.

  1. ^ Assmann, W.; Huber, H.; Steinhausen, Ch.; Dobler, M.; Glückler, H.; Weidinger, A. (1 May 1994). "Elastic recoil detection analysis with heavy ions". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 89 (1–4): 131–139. Bibcode:1994NIMPB..89..131A. doi:10.1016/0168-583X(94)95159-4.
  2. ^ Brijs, B.; Deleu, J.; Conard, T.; De Witte, H.; Vandervorst, W.; Nakajima, K.; Kimura, K.; Genchev, I.; Bergmaier, A.; Goergens, L.; Neumaier, P.; Dollinger, G.; Döbeli, M. (2000). "Characterization of ultra thin oxynitrides: A general approach". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 161–163: 429–434. Bibcode:2000NIMPB.161..429B. CiteSeerX 10.1.1.521.6748. doi:10.1016/S0168-583X(99)00674-6.
  3. ^ Dollinger, G.; Bergmaier, A.; Faestermann, T.; Frey, C. M. (1995). "High resolution depth profile analysis by elastic recoil detection with heavy ions". Fresenius' Journal of Analytical Chemistry. 353 (3–4): 311–315. doi:10.1007/BF00322058. PMID 15048488. S2CID 197595083.
  4. ^ Maas, Adrianus Johannes Henricus (1998). Elastic recoil detection analysis with [alpha]-particles. Eindhoven: Eindhoven University of Technology. ISBN 9789038606774.