Pentafluoride may refer to:
- Antimony pentafluoride, SbF5
- Arsenic pentafluoride, AsF5
- Bismuth pentafluoride, BiF5
- Bromine pentafluoride, BrF5
- Chlorine pentafluoride, ClF5
- Chromium pentafluoride, CrF5
- Gold pentafluoride, Au2F10
- Iodine pentafluoride, IF5
- Iridium pentafluoride, IrF5
- Manganese pentafluoride, MnF5 (predicted)
- Molybdenum pentafluoride, MoF5
- Niobium pentafluoride, NbF5
- Nitrogen pentafluoride, NF5 (hypothetical)
- Neptunium pentafluoride, NpF5
- Osmium pentafluoride, OsF5
- Phosphorus pentafluoride, PF5
- Platinum pentafluoride, PtF5
- Plutonium pentafluoride, PuF5
- Protactinium pentafluoride, PaF5
- Rhenium pentafluoride, ReF5
- Rhodium pentafluoride, RhF5
- Ruthenium pentafluoride, RuF5
- Tantalum pentafluoride, TaF5
- Technetium pentafluoride, TcF5
- Tungsten pentafluoride, WF5
- Uranium pentafluoride, UF5
- Vanadium pentafluoride, VF5
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