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Surface micromachining builds microstructures by deposition and etching structural layers over a substrate.[1] This is different from Bulk micromachining, in which a silicon substrate wafer is selectively etched to produce structures.
- ^ Bustillo, J.M.; R.T. Howe; R.S. Muller (August 1998). "Surface micromachining for microelectromechanical systems". Proceedings of the IEEE. 86 (8): 1552–1574. CiteSeerX 10.1.1.120.4059. doi:10.1109/5.704260.