Trichlorosilane

Trichlorosilane
Names
IUPAC name
trichlorosilane
Other names
silyl trichloride, silicochloroform
Identifiers
3D model (JSmol)
ChemSpider
ECHA InfoCard 100.030.026 Edit this at Wikidata
EC Number
  • 233-042-5
RTECS number
  • VV5950000
UNII
UN number 1295
  • InChI=1S/Cl3HSi/c1-4(2)3/h4H checkY
    Key: ZDHXKXAHOVTTAH-UHFFFAOYSA-N checkY
  • InChI=1/Cl3HSi/c1-4(2)3/h4H
    Key: ZDHXKXAHOVTTAH-UHFFFAOYAH
  • Cl[SiH](Cl)Cl
Properties
HCl3Si
Molar mass 135.45 g/mol
Appearance colourless liquid
Density 1.342 g/cm3
Melting point −126.6 °C (−195.9 °F; 146.6 K)
Boiling point 31.8 °C (89.2 °F; 304.9 K)
hydrolysis
Hazards[1]
GHS labelling:
GHS02: FlammableGHS05: CorrosiveGHS06: ToxicGHS07: Exclamation mark
Danger
H224, H250, H302, H314, H332
P231, P280, P305+P351+P338+P310, P310, P370+P378
NFPA 704 (fire diamond)
NFPA 704 four-colored diamondHealth 3: Short exposure could cause serious temporary or residual injury. E.g. chlorine gasFlammability 4: Will rapidly or completely vaporize at normal atmospheric pressure and temperature, or is readily dispersed in air and will burn readily. Flash point below 23 °C (73 °F). E.g. propaneInstability 2: Undergoes violent chemical change at elevated temperatures and pressures, reacts violently with water, or may form explosive mixtures with water. E.g. white phosphorusSpecial hazard W: Reacts with water in an unusual or dangerous manner. E.g. sodium, sulfuric acid
3
4
2
W
Flash point −27 °C (−17 °F; 246 K)
185 °C (365 °F; 458 K)
Explosive limits 1.2–90.5%
Safety data sheet (SDS) ICSC 0591
Related compounds
Related chlorosilanes
 Chlorosilane
Dichlorosilane
Dichloromethylsilane
Chlorodimethylsilane
Silicon tetrachloride
Related compounds
 Trifluorosilane
Tribromosilane
Chloroform
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Trichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.[2]

  1. ^ "GESTIS-Stoffdatenbank". gestis.dguv.de.
  2. ^ Lianhong Xu, Ravi Kurukulasuriya, "Trichlorosilane" Encyclopedia of Reagents for Organic Synthesis, 2006. doi:10.1002/047084289X.rt213.pub2