| Names | |
|---|---|
| IUPAC name
tetrafluorotungsten
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| Other names
Tungsten(4+) tetrafluoride, Tungsten tetrafluoride
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| Identifiers | |
3D model (JSmol)
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| ChemSpider | |
| EC Number |
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PubChem CID
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CompTox Dashboard (EPA)
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| Properties | |
| WF4 | |
| Molar mass | 259.8336128 g/mol |
| Appearance | Red-Brown or Black Solid[1] |
| Related compounds | |
Other anions
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Tungsten(IV) chloride |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Tungsten tetrafluoride is an inorganic compound with the formula WF4. This little studied solid has been invoked, together with tungsten pentafluoride, as an intermediate in the chemical vapor deposition of tungsten films using tungsten hexafluoride.[2]
- ^ Cite error: The named reference
Source3was invoked but never defined (see the help page). - ^ Creighton, J. R. (1989). "Selectivity loss during tungsten chemical vapor deposition: The role of tungsten pentafluoride". Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 7 (3): 621–624. Bibcode:1989JVSTA...7..621C. doi:10.1116/1.575854.