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| Names | |||
|---|---|---|---|
| Systematic IUPAC name
Trifluoro-λ3-chlorane[1] (substitutive) | |||
| Other names
Chlorotrifluoride
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| Identifiers | |||
3D model (JSmol)
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| ChEBI | |||
| ChemSpider | |||
| ECHA InfoCard | 100.029.301 | ||
| EC Number |
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| 1439 | |||
| MeSH | chlorine+trifluoride | ||
PubChem CID
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| RTECS number |
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| UNII | |||
| UN number | 1749 | ||
CompTox Dashboard (EPA)
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| Properties | |||
| ClF3 | |||
| Molar mass | 92.45 g·mol−1 | ||
| Appearance | Colorless gas or greenish-yellow liquid | ||
| Odor | Sweet, pungent, irritating, suffocating[2][3] | ||
| Density | 3.779 g/L[4] | ||
| Melting point | −76.34 °C (−105.41 °F; 196.81 K)[4] | ||
| Boiling point | 11.75 °C (53.15 °F; 284.90 K)[4] (decomposes at 180 °C, 356 °F, 453 K) | ||
| Reacts with water[1] | |||
| Solubility | Soluble in carbon tetrachloride but explosive in high concentrations. Reacts with hydrogen-containing compounds e.g. hydrogen, methane, benzene, ether, ammonia.[1] | ||
| Vapor pressure | 175 kPa | ||
| −26.5×10−6 cm3/mol[5] | |||
| Viscosity | 91.82 μPa s | ||
| Structure | |||
| T-shaped molecular geometry | |||
| Thermochemistry[6] | |||
Heat capacity (C)
|
63.9 J K−1 mol−1 | ||
Std molar
entropy (S⦵298) |
281.6 J K−1 mol−1 | ||
Std enthalpy of
formation (ΔfH⦵298) |
−163.2 kJ mol−1 | ||
Gibbs free energy (ΔfG⦵)
|
−123.0 kJ mol−1 | ||
| Hazards | |||
| Occupational safety and health (OHS/OSH): | |||
Main hazards
|
Very toxic, very corrosive, powerful oxidizer, violent hydrolysis[3] | ||
| GHS labelling: | |||
   
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| Danger | |||
| NFPA 704 (fire diamond) | |||
| Flash point | Noncombustible[3] | ||
| Lethal dose or concentration (LD, LC): | |||
LC50 (median concentration)
|
95 ppm (rat, 4 hr) 178 ppm (mouse, 1 hr) 230 ppm (monkey, 1 hr) 299 ppm (rat, 1 hr) [7] | ||
| NIOSH (US health exposure limits): | |||
PEL (Permissible)
|
C 0.1 ppm (0.4 mg/m3)[3] | ||
REL (Recommended)
|
C 0.1 ppm (0.4 mg/m3)[3] | ||
IDLH (Immediate danger)
|
20 ppm[3] | ||
| Safety data sheet (SDS) | [1] | ||
| Related compounds | |||
Related compounds
|
Chlorine pentafluoride Chlorine monofluoride Bromine trifluoride Iodine trifluoride | ||
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Chlorine trifluoride is an interhalogen compound with the formula ClF3. It is a colorless, poisonous, corrosive, and extremely reactive gas that condenses to a pale-greenish yellow liquid, the form in which it is most often sold (pressurized at room temperature). It is famous for its extreme oxidation properties. The compound is primarily of interest in plasmaless cleaning and etching operations in the semiconductor industry,[8][9] in nuclear reactor fuel processing,[10] historically as a component in rocket fuels, and various other industrial operations owing to its corrosive nature.[11]
- ^ a b c "Chlorine trifluoride". PubChem Compound. National Center for Biotechnology Information. 4 July 2023. Retrieved 8 July 2023.
- ^ ClF3/Hydrazine Archived 2007-02-02 at the Wayback Machine at the Encyclopedia Astronautica.
- ^ a b c d e f NIOSH Pocket Guide to Chemical Hazards. "#0117". National Institute for Occupational Safety and Health (NIOSH).
- ^ a b c Haynes, William M., ed. (2011). CRC Handbook of Chemistry and Physics (92nd ed.). CRC Press. p. 4.58. ISBN 978-1-4398-5511-9.
- ^ Haynes, William M., ed. (2011). CRC Handbook of Chemistry and Physics (92nd ed.). CRC Press. p. 4.132. ISBN 978-1-4398-5511-9.
- ^ Haynes, William M., ed. (2011). CRC Handbook of Chemistry and Physics (92nd ed.). CRC Press. p. 5.8. ISBN 978-1-4398-5511-9.
- ^ "Chlorine trifluoride". Immediately Dangerous to Life or Health Concentrations (IDLH). National Institute for Occupational Safety and Health (NIOSH).
- ^ Habuka, Hitoshi; Sukenobu, Takahiro; Koda, Hideyuki; Takeuchi, Takashi; Aihara, Masahiko (2004). "Silicon Etch Rate Using Chlorine Trifluoride". Journal of the Electrochemical Society. 151 (11): G783–G787. Bibcode:2004JElS..151G.783H. doi:10.1149/1.1806391. Archived from the original on 2022-01-25. Retrieved 2017-04-11.
- ^ Xi, Ming et al. (1997) U.S. patent 5,849,092 "Process for chlorine trifluoride chamber cleaning"
- ^ Board on Environmental Studies and Toxicology, (BEST) (2006). Acute Exposure Guideline Levels for Selected Airborne Chemicals: Volume 5. Washington D.C.: National Academies Press. p. 40. ISBN 978-0-309-10358-9. (available from National Academies Press Archived 2014-11-07 at the Wayback Machine
)
- ^ Boyce, C. Bradford and Belter, Randolph K. (1998) U.S. patent 6,034,016 "Method for regenerating halogenated Lewis acid catalysts"
