Inchworm motor

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The inchworm motor is a device that uses piezoelectric actuators to move a shaft with nanometer precision.

In its simplest form, the inchworm motor uses three piezo-actuators (2 and 3, see Figure 1.) mounted inside a tube (1) and electrified in sequence to grip a shaft (4) which is then moved in a linear direction. Motion of the shaft is due to the extension of the lateral piezo (2) pushing on two clutching piezos (3).