| Discipline | Physics |
|---|---|
| Language | English |
| Edited by | Eray Aydil |
| Publication details | |
| History | 1964–present |
| Publisher | American Institute of Physics on behalf of the American Vacuum Society (United States) |
| Frequency | Bimonthly |
| 2.427 (Part A) 1.416 (Part B) (2020) | |
| Standard abbreviations | |
| ISO 4 | J. Vac. Sci. Technol. |
| Indexing | |
Journal of Vacuum Science and Technology | |
| ISSN | 0022-5355 |
Journal of Vacuum Science and Technology A | |
| CODEN | JVTAD6 |
| ISSN | 0734-2101 (print) 1520-8559 (web) |
| LCCN | 83643441 |
| OCLC no. | 08697396 |
Journal of Vacuum Science and Technology B | |
| CODEN | JVTBD9 |
| ISSN | 0734-211X |
| LCCN | 83642371 |
| OCLC no. | 08697479 |
| Links | |
The Journal of Vacuum Science and Technology is a peer-reviewed scientific journal published in two parts, A and B, by the American Institute of Physics on behalf of the American Vacuum Society. It was established in 1964 and the editor-in-chief is Eray Aydil (University of Minnesota).