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Nanolithography (NL) is a growing field of techniques within nanotechnology dealing with the engineering (patterning e.g. etching, depositing, writing, printing etc) of nanometer-scale structures on various materials.
The modern term reflects on a design of structures built in range of 10−9 to 10−6 meters, i.e. nanometer scale. Essentially, the field is a derivative of lithography, only covering very small structures. All NL methods can be categorized into four groups: photo lithography, scanning lithography, soft lithography and other miscellaneous techniques.[1]
- ^ Hawkes, Peter W. (2010). Advances in imaging and electron physics. Volume 164. Amsterdam: Academic Press. ISBN 978-0-12-381313-8. OCLC 704352532.