Oxalyl fluoride

Oxalyl fluoride
Structural formula of oxalyl fluoride	Ball-and-stick model of oxalyl fluoride
Names
	Preferred IUPAC name Oxalyl difluoride
	Other names TL-108
Identifiers
CAS Number	359-40-0 ;
3D model (JSmol)	Interactive image;
ChemSpider	9287 ;
ECHA InfoCard	100.006.029
EC Number	206-630-4;
PubChem CID	9668;
UNII	2L7RR7QFL9 ;
CompTox Dashboard (EPA)	DTXSID9059888 ;
	InChI InChI=1/C2F2O2/c3-1(5)2(4)6;
	SMILES C(=O)(C(=O)F)F;
Properties
Chemical formula	C2F2O2
Molar mass	94.017 g/mol
Melting point	−3 °C (27 °F; 270 K)
Boiling point	26.6 °C (79.9 °F; 299.8 K)
	Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). verify (what is ?) Infobox references

Oxalyl fluoride is the organofluorine compound with the formula (COF)₂. It is a fluorinated derivative of oxalic acid. This colorless liquid is prepared by reaction of sodium fluoride with oxalyl chloride.^[1]

Oxalyl fluoride is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.^[2]^[3]

^ C. W. Tullock, D. D. Coffman (1960). "Synthesis of Fluorides by Metathesis with Sodium Fluoride". J. Org. Chem. 25 (11): 2016–2019. doi:10.1021/jo01081a050.
^ Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
^ Simon Karecki; Ritwik Chatterjee; Laura Pruette; Rafael Reif; Terry Sparks; Laurie Beu; Victor Vartanian & Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141–G149. Bibcode:2001JElS..148G.141K. doi:10.1149/1.1348263.

[1] C. W. Tullock, D. D. Coffman (1960). "Synthesis of Fluorides by Metathesis with Sodium Fluoride". J. Org. Chem. 25 (11): 2016–2019. doi:10.1021/jo01081a050.

[2] Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.

[3] Simon Karecki; Ritwik Chatterjee; Laura Pruette; Rafael Reif; Terry Sparks; Laurie Beu; Victor Vartanian & Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141–G149. Bibcode:2001JElS..148G.141K. doi:10.1149/1.1348263.

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