SMIF (interface)

SMIF POD for 6" wafers

SMIF (Standard Mechanical Interface) is a wafer carrier used in semiconductor wafer fabrication and cleanroom environments. The isolation technology was developed in the 1980s by a group known as the "micronauts" at Hewlett-Packard in Palo Alto. It is a SEMI standard.[1]

  1. ^ https://store-us.semi.org/products/e01900-semi-e19-specification-for-standard-mechanical-interface-smif?_pos=1&_sid=4b6273910&_ss=r E19-0417