SONOS

For other uses, see Sonos (disambiguation).

SONOS, short for "silicon–oxide–nitride–oxide–silicon", more precisely, "polycrystalline silicon"—"silicon dioxide"—"silicon nitride"—"silicon dioxide"—"silicon",[1]: 121  is a cross sectional structure of MOSFET (metal–oxide–semiconductor field-effect transistor), realized by P.C.Y. Chen of Fairchild Camera and Instrument in 1977.[2] This structure is often used for non-volatile memories, such as EEPROM and flash memories. It is sometimes used for TFT LCD displays.[3] It is one of CTF (charge trap flash) variants. It is distinguished from traditional non-volatile memory structures by the use of silicon nitride (Si3N4 or Si9N10) instead of "polysilicon-based FG (floating-gate)" for the charge storage material.[4]: Fig. 1  A further variant is "SHINOS" ("silicon"—"hi-k"—"nitride"—"oxide"—"silicon"), which is substituted top oxide layer with high-κ material. Another advanced variant is "MONOS" ("metal–oxide–nitride–oxide–silicon").[5]: 137 [6]: 66  Companies offering SONOS-based products include Cypress Semiconductor, Macronix, Toshiba, United Microelectronics Corporation and Floadia Archived 2022-11-01 at the Wayback Machine.

  1. ^ Micheloni, Rino; Crippa, Luca; Marelli, Alessia (2010). Inside NAND Flash Memories (Google Books). Springer Science & Business Media. ISBN 9789048194315.
  2. ^ Cite error: The named reference Chen 1997 was invoked but never defined (see the help page).
  3. ^ Chen, S. C.; Chang, T. C.; Liu, P. T.; Wu, Y. C.; Lin, P. S.; Tseng, B. H.; Shy, J. H.; Sze, S. M.; Chang, C. Y.; Lien, C. H. (2007). "A Novel Nanowire Channel Poly-Si TFT Functioning as Transistor and Nonvolatile SONOS Memory". IEEE Electron Device Letters. 28 (9): 809–811. Bibcode:2007IEDL...28..809C. doi:10.1109/LED.2007.903885. ISSN 0741-3106. S2CID 40413991.
  4. ^ Lee, M. C.; Wong, H. Y. (2013). "Charge Loss Mechanisms of Nitride-Based Charge Trap Flash Memory Devices". IEEE Transactions on Electron Devices. 60 (10): 3256–3264. Bibcode:2013ITED...60.3256L. doi:10.1109/TED.2013.2279410. ISSN 0018-9383. S2CID 41506023.
  5. ^ Prince, Betty (2007). Emerging Memories: Technologies and Trends. Springer Science & Business Media. ISBN 9780306475535.
  6. ^ Remond, I.; Akil, N. (May 2006). "Modeling of transient programming and erasing of SONOS non-volatile memories". Technical Note PR-TN 2006/00368. Koninklijke Philips Electronics N.V. CiteSeerX 10.1.1.72.314.