Thermal scanning probe lithography

Thermal polymer decomposition

Thermal scanning probe lithography (t-SPL) is a form of scanning probe lithography[1] (SPL) whereby material is structured on the nanoscale using scanning probes, primarily through the application of thermal energy.

Related fields are thermo-mechanical SPL (see also Millipede memory), thermochemical SPL[2][3] (or thermochemical nanolithography) where the goal is to influence the local chemistry, and thermal dip-pen lithography[4] as an additive technique.

  1. ^ Garcia, Ricardo; Knoll, Armin W.; Riedo, Elisa (August 2014). "Advanced scanning probe lithography". Nature Nanotechnology. 9 (8): 577–587. arXiv:1505.01260. Bibcode:2014NatNa...9..577G. doi:10.1038/nnano.2014.157. ISSN 1748-3387. PMID 25091447. S2CID 205450948.
  2. ^ Szoszkiewicz, Robert; Okada, Takashi; Jones, Simon C.; Li, Tai-De; King, William P.; Marder, Seth R.; Riedo, Elisa (2007-04-01). "High-Speed, Sub-15 nm Feature Size Thermochemical Nanolithography". Nano Letters. 7 (4): 1064–1069. Bibcode:2007NanoL...7.1064S. doi:10.1021/nl070300f. ISSN 1530-6984. PMID 17385937.
  3. ^ Fenwick, Oliver; Bozec, Laurent; Credgington, Dan; Hammiche, Azzedine; Lazzerini, Giovanni Mattia; Silberberg, Yaron R.; Cacialli, Franco (October 2009). "Thermochemical nanopatterning of organic semiconductors". Nature Nanotechnology. 4 (10): 664–668. Bibcode:2009NatNa...4..664F. doi:10.1038/nnano.2009.254. ISSN 1748-3387. PMID 19809458.
  4. ^ Nelson, B. A.; King, W. P.; Laracuente, A. R.; Sheehan, P. E.; Whitman, L. J. (2006-01-16). "Direct deposition of continuous metal nanostructures by thermal dip-pen nanolithography". Applied Physics Letters. 88 (3): 033104. Bibcode:2006ApPhL..88c3104N. doi:10.1063/1.2164394. ISSN 0003-6951.