Tungsten(IV) fluoride

Tungsten(IV) fluoride
Names
IUPAC name
tetrafluorotungsten
Other names
Tungsten(4+) tetrafluoride, Tungsten tetrafluoride
Identifiers
3D model (JSmol)
ChemSpider
EC Number
  • 232-029-1
  • InChI=1S/4FH.W/h4*1H;/q;;;;+4/p-4
  • F[W](F)(F)F
Properties
WF4
Molar mass 259.8336128 g/mol
Appearance Red-Brown or Black Solid[1]
Related compounds
Other anions
Tungsten(IV) chloride
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).

Tungsten tetrafluoride is an inorganic compound with the formula WF4. This little studied solid has been invoked, together with tungsten pentafluoride, as an intermediate in the chemical vapor deposition of tungsten films using tungsten hexafluoride.[2]

  1. ^ Cite error: The named reference Source3 was invoked but never defined (see the help page).
  2. ^ Creighton, J. R. (1989). "Selectivity loss during tungsten chemical vapor deposition: The role of tungsten pentafluoride". Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 7 (3): 621–624. Bibcode:1989JVSTA...7..621C. doi:10.1116/1.575854.